About Us

Home>Contact>About Us

    MNT®Micro and Nanotech Co.,Ltd is a professional producer of atomic layer deposition(ALD) equipments and systems in China.MNT®has served for more than hundreds of researchers with customer-designed and standard ALD systems, which covered from the universities, academies and industries.

    We offer both thermal ALD equipment and plasma-enhanced ALD(PE-ALD)system, which can integrate ozone generator and pulsed light source.Recently, we produce standard ALD system for clean-room application, which can avoid cross-contamination from different precursors(with patents).Our professional team can supply tailored ALD system with special characters, like deposition chambers,precursor transport pipelines and exhaust pollution treatment setup.